Nanometrology techniques

As it is obvious from these sites, the most widespread tool in the field in nanometrology there are various methods of raster microscopy (SPM - scanning probe microscopy). From the large family of these methods here are the most important which probably have the largest potential in the field of qualitative measurement:

• AFM - Atomic force microscopy
• STM - Scanning tunneling microscopy
• MFM - Magnetic force microscopy
• EFM - Electric force microscopy
• C-AFM - Conductive AFM
• KPFM - Kelvin probe force microscopy
• SCM - Scanning capacitance microscopy
• SThM - Scanning thermal microscopy
• SNOM - Scanning near-field optical microscopy

Except these methods we also use techniques like nanoindentation, microindentation and scratch tests, which although do not provide such large spatial resolution but enable to measure forces and mechanical properties in much higher precision.

(c) CMI 2012