Nanometrology techniques
As it is obvious from these sites, the most widespread tool in the field in nanometrology there
are various methods of raster microscopy (SPM - scanning probe microscopy). From the large family of these methods
here are the most important which probably have the largest potential in the field of qualitative measurement:
Except these methods we also use techniques like
nanoindentation, microindentation and scratch tests,
which although do not provide such large spatial resolution but enable to measure forces
and mechanical properties in much higher precision.
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