Research topics

There are many directions in the field of nanometrology that we could take and a small research group certainly cannot address all of them. We try to concentrate on quantitative methods in scanning probe microscopy and related methods, focusing on integration of measurement and numerical analysis methods.

Even if most of the research is project based, we are trying to head all the particular research topics towards a complex set of methodology for SPM based nanometrology, hoping that the results could be used also by other researchers. From the main research directions we can select the following:

• Instrumentation development for special nanometrology measurements.
• Quantitative methods developement for SPM, including methods for properties other than length and including extensive numerical modeling.
• Software development for SPM data interpretation and processing.
• Traceability and methodology for different nanoscale measurement methods.

(c) CMI 2012