Xraytrace documentation

Ist from this paper: 10.3390/ma7043147X

The sample structure is slightly different however: Its Al2O3 on Sc2O3 on Si The thicknesses of 0.14nm for Sc2O3 and 0.15nm for Al2O3 are only estimates. Here we would also need to have either a modeling using the thicknesses and densities or you try different densities and keeping the quantified mass depositions constant (product of density and thickness).

This example comes from some work of 0.14 nm of Sc₂O₃ on silicon (is that right?), 5 keV energy, 0.24797 nm wavelength.