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sc2o3_film
Sc₂O₃ film
Information from Philipp:
It is from this paper: 10.3390/ma7043147X
The sample structure is slightly different however: Its Al2O3 on Sc2O3 on Si The thicknesses of 0.14nm for Sc2O3 and 0.15nm for Al2O3 are only estimates. Here we would also need to have either a modeling using the thicknesses and densities or you try different densities and keeping the quantified mass depositions constant (product of density and thickness).
Measurement was performed for 5 keV energy, 0.24797 nm wavelength.
sc2o3_film.txt · Last modified: 2018/01/28 15:42 by pklapetek
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